Focused Ion Beam Scanning Electron Microscope
Image of Zeiss Auriga FIB-SEM [View Image]
The Auriga combines a high resolution SEM to the precision milling and nanofabrication abilities of a high resolution FIB. The SEM features Schottky field emission Gemini electron column operating between 100V and 30kV, capable of resolutions of 1.0nm at 15kV and 1.9nm at 1kV. The SEM column is coupled with an Orsay Physics “Cobra” Ga+ ion FIB. The FIB column operates between 1kV and 30kV with a range of ion beam currents between 1pA and 20nA. It also has the capability of imaging to 2.5nm resolution.