EGRE 334. Introduction to Microfabrication. 4 Hours.

Semester course; 3 lecture and 3 laboratory hours. 4 credits. Prerequisites: CHEM 101, MATH 201 and PHYS 208, all with a minimum grade of C. This course gives an overview of microscale device fabrication and testing for a general audience. A wide variety of new terms, equipment and processes are presented. Fundamentals of photolithography, mask making, diffusion, oxidation, ion implantation, film deposition and etching are covered. Laboratory work consists of safety training, hands-on fabrication experience and testing. A laboratory chip test is fabricated from start to finish and then tested. The test chip includes basic integrated circuit elements as well as solar cells.

Double major (B.S.) in engineering and physics

...can be chosen from EGRE 303 , EGRE 307 , EGRE 334 and EGRE 521 . MATH 307...